• 2 station SMIF wafer sorter
   
• dual paddle buffering for same carrier sorting
   
• 350wph OCR / 800wph transfer
   
• smaller 2 station footprint for tight fab spacing
   
• integrated subclass 1 mini-environment
   
• smallest 2 station SMIF footprint available in industry
   
• many sorter+ options can be added on this tool size

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• 3 station SMIF wafer sorter
   
• dual paddle buffering for same carrier sorting
   
• 350wph OCR / 800wph transfer
   
• 3 station configuration for more queueing and on tool 3 way splits
   
• integrated subclass 1 mini-environment
   
• smallest 3 station SMIF footprint available in industry
   
• many sorter+ options can be added on this tool size

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• 2 station 300mm SMIF wafer sorter
   
• 50000hr robot MTBF / 150,000hr loadport MTBF
   
• dual arm buffering for same carrier sorting
   
• 350wph OCR / 750wph transfer
   
• integrated subclass 1 mini-environment
   
• many sorter+ options can be added on this tool size
   
• AltaStream ASWorx300 host interface for guaranteed automation compliance

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