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CHIP

bolt on application for NADA or PST sorters
inspection option which scans the wafer bevel for cracks and chips
image capture and KLARF output
defects down to .05mm
function can be added to any typical sort recipe

gyro

bolt on application for NADA or PST sorters
wafer top-side and bottom-side visual inspection
joystick control or programmable recipe control with pass/fail button
function can be added to any typical sorting recipe
automated inspection can be added

gimbal

bolt on application for NADA or PST sorters
wafer topside ONLY visual inspection
joystick control or programmable recipe control with pass/fail button
function can be added to any typical sorting recipe

scratch

using the gyro function
automated inspection for costly backside scratches
function can be added to any typical sorting recipe
image capture and KLARF output

slip

addition of slipfinder hardware and software
wafer slip is detected and measured using propriety Hologenix lighting and software
typical usage in wafer manufacturing, SOI and EPI
recipes can scan outer wafer edge, center of wafer, both or entire wafer

dimp

addition of dimple hardware and software
dimples are detected and measured using propriety Hologenix lighting and software
typical usage in wafer manufacturing and MEMS markets
whole wafer image processing or magnified version are available

thickness

bolt on application for NADA or PST sorters
wafer thickness measurements
single center point or radial profiling
+/- .2um 3 sigma repeatability
function can be added to any typical sorting recipe
typical recipes bin wafer based on thickness

noimage2a1

capability to handle ultra thin wafer
vortex style paddles for touch-less operation
vortex style alignment for touch-less alignment
as thin as 100um with standard
as thin as 50um with vortex