• 2 station SMIF wafer sorter convert from KLA smif front end
   
• dual paddle buffering for same carrier sorting
   
• 300wph OCR / 700wph transfer
   
• smaller 2 station footprint for tight fab spacing
   
• integrate subclass 1 mini-environment
   
• many sorter+ options can be added on this tool size

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Download PDF for current listing

updated 01/16/09