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- 2 station open carrier wafer sorter
- dual paddle buffering for same carrier sorting
- 350wph OCR / 800wph transfer
- 50mm to 300mm wafer sizes.
- many concurrent wafer size options available
- smaller 2 station footprint for tight fab spacing
- many sorter+ options can be added
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Download PDF for more details
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- 4 station open carrier wafer sorter
- dual paddle buffering for same carrier sorting
- 350wph OCR / 800wph transfer
- 4 station for better queuing and larger on tool splits
- 50mm to 300mm wafer sizes.
- many concurrent wafer size options available
- smallest 4 station footprint available in industry
- all sorter+ options can be added on this tool size
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Download PDF for more details
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