• two station 150mm / 200 mm SMIF carrier compatible

• industry standard EquipeTM OEM robotics

• smallest 200mm two stage footprint

• sub class 1 particle performance

• automation capable with SECII/GEM/HSMS

• GUI based RBuilderTM for easy recipe developement

• UPS power backup + vacuum resevoir

Specifications
 

dimensions-

size: 1000mmW x 1000mmD (40"W x 40"D)

height: SEMI S2 900mm load height

facilities-

power: 5A at 120V MAX

cleanliness-

pwp: ≤ 0.05 particles per wafer @ ≥ 0.1 µm

OCR-

codes: SEMI M12, M13, BC4 12 barcode T7

rate: 99.998% readability on bare silicon

throughput-

rates: 350WPH OCR / 850WPH transfer

accessibility-

all panels removable

optical mouse or trackball for user input

Options

• programmable rotate and tilt for brightlight inspections

• PEEK, Teflon, or standard end effectors

• NEW thrubeam cassette mapping or HAMA reflective

• epolish stainless or color powder coated panels

• cognex 6140 / 8100 / 1700 OCR

• smarttag sts, hermos or flurotrack compatible stations

• rotating paddle for upside down or programmable angles

• local ionization for static sensitive areas

• handheld barcode reader for material input

• thru wall operation with dual monitor / dual light tower

wms upgrades

• for price sensitive purchases

• upgrade existing legacy wms sorters

• utilizes refurbished components

• robot, aligner, ports have proven life

• refurbished at lower price NADAtech factory warranty

• new pc and OCR, new Win2K based s/w

• higher performance over original tool

• supportable platform will extend fab

download brochure