• two station 300mm SMIF carrier compatible

• industry standard ISEL OEM robotics

• smallest 300mm two stage footprint

• sub class 1 particle performance

• automation capable with SECII/GEM/HSMS/GEM300

• GUI based RBuilderTM for easy recipe developement

• UPS power backup + vacuum resevoir + minienv pressure

Specifications
 

dimensions-

size: 1075mmW x 1382mmD (42"W x 54"D)

height: SEMI S2 900mm load height

facilities-

power: 5A at 120V MAX

cleanliness-

pwp: ≤ 0.05 particles per wafer @ ≥ 0.1 µm

OCR-

codes: SEMI M12, M13, BC4 12 barcode T7

rate: 99.998% readability on bare silicon

throughput-

rates: 350WPH OCR / 850WPH transfer

accessibility-

all panels removable

optical mouse and keyboard for user input

Options

• programmable rotate and tilt for brightlight inspections

• PEEK, Teflon, or standard end effectors

• epolish stainless, aluminum, or color powder coated panels

• cognex 8100 / 1700 OCR - top/bottom side or both

• smarttag sts, hermos or flurotrack compatible stations

• rotating paddle for upside down or programmable angles

• local ionization for static sensitive areas

• handheld barcode reader for material input

• thru wall operation with dual monitor / dual light tower

download brochure