• four station 1XXmm/200mm open cassette compatible

• industry standard Equipe^TM  OEM robotics

• smallest 200mm four stage footprint available

• NEW thrubeam cassette mapping

• automation capable with SECII/GEM/HSMS

• GUI based RBuilder^TM for easy recipe developement

• UPS power backup + vacuum seservoir

Specifications
 

dimensions-

size: 950mmW x 910mmD (37.5"W x 36"D)

height: SEMI s2 900mm load height

facilities-

power: 5A at 120V MAX

cleanliness-

pwp: ≤ 0.05 particles per wafer @ ≥ 0.1 µm

OCR-

codes: SEMI M12, M13, BC412 barcode T7

rate: 99.998% readability on bare silicon

throughput-

rates: 350WPH OCR / 850WPH transfer

accessibility-

all panels removable + keyboard drawer

optical mouse or trackball for user input

Options

• programmable rotate and tilt for brightlight inspections

• PEEK, Teflon, or standard end effectors

• NEW thrubeam cassette mapping or HAMA reflective

• epolish stainless or color powder coated panels

• cognex 6140 / 8100 / 1700 OCR or siemens LKx5 barcode

• hermos or flurotrack RFID compatible stations

• rotating end effector for upside down or programmable angles

• local ionization for static sensitive areas

• handheld barcode reader for material input

• thru wall operation with dual monitor / dual light tower

download brochure